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Understanding the structural and optical properties of silicon nitride
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Basic structural unit of silicon nitride.
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Nitride semiconductors
Schematic diagram of α → β phase transition in silicon nitride sampleChemical structure of silicon nitride Kinetics of silicon nitridation and the formation mechanism of α/βSilicon nitride phase diagram.
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Schematic drawing of the fabrication process: (a) silicon-nitride and
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Fabrication process of the proposed array. a silicon nitride is .
